Electron Beam Evaporator

Concepts

• southampton
• precision equipment
• southampton nanofabrication centre
• electron beam evaporator
• electron beam
• laboratory and optical equipment
• mm wafer lift
• current tools
• high value
• lithography capabilities

Location

Southampton, Hampshire, UK

Description

To complement our lithography capabilities the Southampton Nanofabrication Centre (SNC) is looking to invest in an electron beam evaporator capable of partnering with current tools to deliver high quality 200mm wafer lift off processing. Lift off is a technique which underpins multiple high value and strategic projects for the facility, and we wish to renew our capability for another generation to partner with our next wave of lithography investment. The University is conducting this procurement using the open procedure in accordance with the requirements of the Regulations for the purpose of procuring the goods and services described in the Specification. The University proposes to enter into a Contract for up to two years with the successful tenderer. This will comprise of a contract period of up to one year for the provision of the goods followed by a 12-month warranty.

Total Quantity or Scope

To complement our lithography capabilities the Southampton Nanofabrication Centre (SNC) will invest in an electron beam evaporator capable of partnering with current tools to deliver high quality 200mm wafer lift off processing. Lift off is a technique which underpins multiple high value and strategic projects for the facility and we wish to renew our capability for another generation to partner with our next wave of lithography investment. Specifically, we expect a future DUV (Deep Ultra Violet) scanner lithography critical dimension of 200nm and for 4nm for electron beam write. The primary focus of the procurement is to deliver a tool capable of high resolution 200mm wafer lift off in conjunction with a critical dimension of 4nm. The University is conducting this procurement using the Open procedure in accordance with the requirements of the Regulations for the purpose of procuring the goods and services described in the Specification. The University proposes to enter into a contract for up to two years with the successful tenderer. This will comprise of a contract period of up to one year for the delivery lead-time of the goods followed by a 12-month warranty. The contract will be effective on signing. The term of the warranty will run for 12 months from the date of acceptance of the goods by the University. Contract Value: The estimated value of the is £666,000 GBP excluding VAT. Whilst bidders are expected to provide a proposal that falls within this budget, for the benefit of doubt, the University reserves the right to automatically exclude any bidders whose proposal exceeds this figure. All related components, delivery, installation, commissioning, training, services, and maintenance MUST be included within the proposal. Details of current expenditure or potential future uptake are given as a guide based on past purchasing and current planning to assist you in the preparation of your Tender. They should not be interpreted as an undertaking to purchase any goods or services to any particular value and do not form part of the Contract. This procurement is not suitable for splitting into lots. The risk of dividing the requirement into Lots would render the execution of the contract excessively technically difficult, not cost effective and would undermine proper execution of the contract.

Award Criteria

CPV Codes

• 38000000 - Laboratory, optical and precision equipments (excl. glasses)

Indicators

• This is a one-off contract (no recurrence)
• Renewals are not available.
• Financial restrictions apply.
• Technical restrictions apply.

Other Information

** PREVIEW NOTICE, please check Find a Tender for full details. ** E-Tendering Portal: The University is utilising an electronic tendering tool, In-Tend (https://intendhost.co.uk/ universityofsouthampton) to manage this procurement and to communicate with potential suppliers and/or tenderers (as appropriate). All documentation in relation to this tender can be downloaded from In-Tend. Potential suppliers/tenderers are advised that there will be no hard copy documents issued and all communications with the University, including the submission of Selection Stage and/or Invitation to Tender responses will be conducted via In-Tend. Regular monitoring of the portal is the responsibility of the potential supplier/tenderer. If you are not already registered as a supplier with the University of Southampton, you will need to register in In-Tend in order to access the procurement documentation. Once you have logged in as a supplier: click on 'Tenders'; locate the relevant project; and click 'View Details'. Once you are in the project screen, you will be able to register your organisation against the project and access all documentation by clicking 'Express Interest'. Potential suppliers/tenderers are advised that formal expressions of interest in the project must be by way of completion and return of the relevant documents via In-Tend. Further instructions for the submission of responses are below: To submit your return: 1. Log in 2. Click 'Tenders' 3. Locate the relevant project 4. View details 5. Click on the tab relating to the relevant project stage (e.g. 'Invitation to Tender') 6. Click on the 'Attach Documents' button and upload your return. 7. Check ALL your response documents are uploaded and displayed in the 'My Tender Return' panel. The system will only permit your organisation to make one return. 8. Click the red 'Submit Return' button. Please note, to preserve the integrity of the procurement, all communications with the University must be made via the correspondence function within In-Tend. Publication of Award Details: In accordance with Regulation 50, paragraph (2) of the Public Contracts Regulations 2015 and subject to Article 5 and Annex 5, Part D (13) of Directive 2014/24/EU of the European Parliament and of the Council (if applicable), the University intends to publish the value of any resulting contract at the award stage, and reserves the right to do so. By submitting a response, potential suppliers/tenderers are consenting to publication of this information unless otherwise agreed in advance with the University. Costs and Expenses: Potential suppliers/tenderers are solely responsible for their costs and expenses incurred in connection with the preparation and submission of responses and participation in this and all future stages of this procurement. Under no circumstances will the University be liable for any costs or expenses borne by potential suppliers/tenderers or any of their supply chain, partners or advisers in this procurement process. The University is not liable for any costs in the event of the cancellation of this procurement process.