Wet-thermal oxidation furnace

Concepts

• industrial or laboratory furnaces
• complete wet oxidation system
• cardiff
• wet-thermal oxidation furnace
• oxidation of iii-v compound semiconductors
• incinerators and ovens
• mm capability
• aloxtec system
• capable system
• industry partners

Location

Cardiff and Vale of Glamorgan:

Description

A complete wet oxidation system is required for the oxidation of III-V compound semiconductors, primarily for vertical cavity surface emitting laser (VCSEL) and ridge waveguide applications

Total Quantity or Scope

A complete wet oxidation system is required for the oxidation of III-V compound semiconductors, primarily for vertical cavity surface emitting laser (VCSEL) and ridge waveguide applications. We currently own an ALOXTEC system that was purchased in 2017. It was purchased as a 4” capable system but was upgraded to a 150mm capability following a period of joint development between ALOXTEC (formerly AET) and the ICS. We need to upgrade this system to handle 200mm wafers to continue with our research output and collaboration with our industry partners.

Award Detail

Award Criteria

CPV Codes

• 42300000 - Industrial or laboratory furnaces, incinerators and ovens

Legal Justification

We currently own an ALOXTEC system that was purchased in 2017. It was purchased as a 4” capable system but was upgraded to a 150mm capability following a period of joint development between ALOXTEC (formerly AET) and the ICS. We need to upgrade this system to handle 200mm wafers to continue with our research output and collaboration with our industry partners.

Other Information

** PREVIEW NOTICE, please check Find a Tender for full details. ** (WA Ref:131850)