202122/547 Supply of up to four dry etch and deposition systems

A Contract Award Notice
by UNIVERSITY OF LEEDS

Source
Contracts Finder
Type
Contract (Products)
Duration
3 year
Value
£2M
Sector
INDUSTRIAL
Published
24 Aug 2023
Delivery
10 Dec 2023 to 10 Dec 2026
Deadline
25 May 2023 23:00

Concepts

Location

Geochart for 1 buyers and 1 suppliers

1 buyer

1 supplier

Description

NOTICE OF AWARD OF four dry etch and deposition systems, specifically: • A Deep-Silicon Reactive Ion Etcher (D-RIE) • An Inductively Coupled Plasma-RIE (ICP-RIE) • A parallel plate RIE • A High-Density Plasma-enhanced Chemical Vapour Deposition system (HDP-CVD)

Award Detail

1 Oxford Instruments (Yatton)
  • Value: £2,155,581

CPV Codes

  • 22520000 - Dry-etching equipment

Other Information

Please follow this link to view the notice https://www.delta-esourcing.com/delta/respondToList.html?noticeId=804651228

Reference

Domains