Supply and Commissioning of an Inductively Coupled Plasma Etcher

Concepts

• glasgow
• precision equipment
• plasma etcher
• inductively
• coupled
• etcher
• plasma
• microelectronic machinery and apparatus
• laboratory and optical equipment
• their cleanroom micro-fabrication facility equipment

Location

University of Strathclyde

Description

This Notice relates to an open tender above the Agreement on Government Procurement (GPA) threshold for goods related to research and development equipment required by the University of Strathclyde's (Contracting Authority) Institute of Photonics department. The Contracting Authority envisions a single supplier shall undertake the contract for the supply, delivery, installation and commissioning of an Inductively Coupled Plasma Etcher system at a University of Strathclyde Lab facility, located in the Technology and Innovation Centre (TIC) specified cleanroom. The equipment is grant funded by the Wolfson Foundation to advance scientific investigation in neuro-technology.

Total Quantity or Scope

The Institute of Photonics is seeking to complement their cleanroom micro-fabrication facility equipment with an Inductively Coupled Plasma Etcher system The Technical Team envision that the equipment will process semiconductor materials that will include but not be limited to: 1 Gallium Nitride (GaN) light-emitting diodes 2 Silicon (Si) passive and active devices The equipment will be used to advance scientific investigation in neuro-technology and operated by PhD students, Postdoctoral Research Associates and Technicians within the Institute of Photonics. The Contracting Authority anticipates that the contract will be for a duration of twenty (24) months. The Contracting Authority requires a supplier that can fulfil the below non-exhaustive list of requirements: 1 Inductively Coupled Plasma Reactive Ion Etching (ICP-RIE) mode of operation to plasma etch hard materials such as GaN at etch rate of >500nm/min 2 Deep Silicon Etching (DSE) mode of operation to plasma etch high aspect ratio and high-density structures in Silicon at etch rate of >1000nm/min 3 These two modes of operation co-existing within the same equipment within a minimal footprint 4 Low-maintenance, especially with the provision of servicing-free high vacuum pumping systems (magnetic-levitated turbo molecular pump) Please refer to the full technical and tender information available in the Public Contracts Scotland-Tender.

Renewal Options

The Contracting Authority reserves the right to request additional deliveries by the successful Tenderer, either intended as partial replacement of supplies or installations or as extensions of existing supplies and installations. The Contracting Authority may at it's sole discretion exercise this option.

Award Criteria

CPV Codes

• 38000000 - Laboratory, optical and precision equipments (excl. glasses)
• 31712100 - Microelectronic machinery and apparatus

Indicators

• This is a one-off contract (no recurrence)
• Options are available.
• Renewals are not available.
• Financial restrictions apply.
• Technical restrictions apply.

Other Information

** PREVIEW NOTICE, please check Find a Tender for full details. ** The buyer is using PCS-Tender to conduct this ITT exercise. The Project code is 29124. For more information see: http://www.publiccontractsscotland.gov.uk/info/InfoCentre.aspx?ID=2343 Community benefits are included in this requirement. For more information see: https://www.gov.scot/policies/public-sector-procurement/community-benefits-in-pr... A summary of the expected community benefits has been provided as follows: Voluntary Community benefits are included in this requirement. For more information see: https://www.gov.scot/policies/public-sector-procurement/community-benefits-in-pr... The Contracting Authority acknowledges that is procurement activities have a significant impact on the environment, society and the economy. The Contracting Authority recognises that Community Benefits are a key component in maximising social, economic and environmental benefits. The achievements and delivery of Community Benefits can contribute to the University of Strathclyde's strategic Plan 2030. The Contracting Authority proposes to use a Voluntary Approach to Community Benefits for this requirement; This approach is to encourage the Tenderer to offer Community Benefits post Tender Submission. These offered Community Benefits will not form part of the contractual obligation and will not form part of the consideration at Tender evaluation stage. (SC Ref:800205)